It has been 24 days since the incubation start and nothing hatched so I decided to candle the eggs to see if anything is moving, but I couldn't see any movements at all so I opened one egg just to find a dead chick. All the other eggs were also dead

I dont know what happened?!
The temperature was all the time 37,5'C on the incubator thermostat. On the extra thermostat showed 38'C and on the thermostat intended for human body temperature it sais 37,6'C.
Humidity was mostly on 49% but could go down to 30% for the first 18 days. After 18th day I raised the humidity to 70%.
The machine is turning the eggs automatically and I checked on it every day to see if it is turning them.

The dead chicks all have this egg yolk attached to their body. It seems as if they have died a few days before the 21th day, no? What happened? All help much appreciated!